The thermal insulation rings were developed as thermal insulator for diffusion furnace,CVD equipment,etc in semi-conductor manufacturing process at temperature of up to 1,300℃.
The thermal insulation rings are high quality hand-made products that are fabricated with a combination of ALF™ textiles as outer material,ceramic fiber products(mainly the blanket and board)as inner material and ALF™ sewing thread.
The thermal insulation rings are designed in accordance with customers' specific requests in order to fit various quartz or silicon carbide tubes in the furnace.
There are two types of thermal insulation rings. One type is regular grade. The other type is high purity grade. At present insulation rings gradually are going toward high purity grade type.
ALF™ textiles and ceramic fiber products are sized by organic resins.We do“heat cleaning”for thermal insulation rings before we send them to your factory in order to avoid contaminating your furnaces.
1) Long life for using ALF™ fabrics(compared with silica or quartz).
2) High energy saving because of excellent sealing capability.
3) Reduced contamination.
4) No vaporized substances at high temperatures(ALF™ is Boron-free Alumina-silica fiber).
5) Availability of fabricating various forms for customer’s specific requests.
6) Reduced downtime.
7) Smooth temperature profile.
|Outer insulation Material||Alumina-cloth HG-3025-T||Alumina-cloth 3025-T|
|Inner insulation material||Ceramic Fiber HP Blanket
Ceramic Fiber HP Board
|Ceramic Fiber Blanket
Ceramic Fiber Board
|Sewing Thread||Yarn HG-T-5760D||Yarn T-5760D|
|Strings||Braided Sleeve HG-SV-4||Braided Sleeve SV-4|